MEMS and NEMS systems Devices and Structures
Lyshevski Sergey E MEMS and NEMS systems Devices and Structures
MEMS and NEMS systems Devices and Structures Sergey E Lyshevski - CRC Press 2002 - 461p.
9780849312625
MEMS and NEMS systems Devices and Structures Sergey E Lyshevski - CRC Press 2002 - 461p.
9780849312625