000 00306 a2200121 4500
020 _a9788181288493
245 _aMechanics of microelectromechanical systems
_cNicolae Lobontiu
260 _bSpringer
_c2005
300 _a405p
700 _aEphrahim Garcia
_9549
942 _cBK
100 _aLobontiu Nicolae
_9416
999 _c732
_d732